A study of nano structure by roll to roll imprint lithography

Imprint lithography process is a unique printing technique that create graphic, electronic and biomedical printed on substrates. PET plastics are an example of materials that can be used as printing substrate in producing nano-scale electronic and medical devices. Here, it is proposed that extending...

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Bibliographic Details
Published in2015 International Symposium on Technology Management and Emerging Technologies (ISTMET) pp. 132 - 135
Main Authors Hassan, S., Yusof, M. S., Maksud, M. I., Nodin, M. N., Rejab, N. A., Mamat, K. A.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.08.2015
Subjects
Imprinting Lithography
Lithography
Nano-scale printing
OFETs
Plastics
Positron emission tomography
Printing
Roll to Roll
Silicon
Solid lines
Substrates
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Summary:Imprint lithography process is a unique printing technique that create graphic, electronic and biomedical printed on substrates. PET plastics are an example of materials that can be used as printing substrate in producing nano-scale electronic and medical devices. Here, it is proposed that extending imprint lithography technique into the multiple nano-structure printing fine solid lines onto substrate. Imprint lithography is a low cost printing technique commonly used in manufacturing and printing industry. This study exhibit successful fine solid lines imprinting below 1 micrometer in line width, gap and height on polyethylene-terephthalate (PET) substrate. This paper illustrates the use of imprint lithography method in producing multiple nano-solid lines printing capability as application of printing electronic, graphic and bio-medical.
DOI:10.1109/ISTMET.2015.7359016