Improved Dynamic R ON of GaN Vertical Trench MOSFETs (OG-FETs) Using TMAH Wet Etch

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Bibliographic Details
Published inIEEE electron device letters Vol. 39; no. 7; pp. 1030 - 1033
Main Authors Ji, Dong, Li, Wenwen, Agarwal, Anchal, Chan, Silvia H., Haller, Jeffrey, Bisi, Davide, Labrecque, Michelle, Gupta, Chirag, Cruse, Bill, Lal, Rakesh, Keller, Stacia, Mishra, Umesh K., Chowdhury, Srabanti
Format Journal Article
LanguageEnglish
Published 01.07.2018
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ISSN:0741-3106
1558-0563
DOI:10.1109/LED.2018.2843335