The effect of thickness and loading force on wear behavior of HfO 2

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Bibliographic Details
Published inJournal of physics. Conference series Vol. 483; p. 12023
Main Authors He, B-C, Fu, W-E, Chang, Y-Q, Liou, H-C
Format Journal Article
LanguageEnglish
Published 28.03.2014
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ISSN:1742-6596
1742-6596
DOI:10.1088/1742-6596/483/1/012023