Controlled motion, the enabling technology

This abbreviated version of a paper presented at SPIE's Smart Structures & Materials symposium in San Diego earlier this year, demonstrates the application of smart materials to the very real problem of controlled motion, which successfully allows movement in the 10 μm range with resolution...

Full description

Saved in:
Bibliographic Details
Published inSmart materials bulletin Vol. 2002; no. 6; pp. 7 - 11
Main Authors Powers, Galen, Fasick, John, Xu, Qin
Format Journal Article
LanguageEnglish
Published Elsevier B.V 2002
Online AccessGet full text

Cover

More Information
Summary:This abbreviated version of a paper presented at SPIE's Smart Structures & Materials symposium in San Diego earlier this year, demonstrates the application of smart materials to the very real problem of controlled motion, which successfully allows movement in the 10 μm range with resolution of nm. This is the critical requirement for successful assembly or functional verification of an assembly, and is very important in the MEMS and MOEMS environments.
ISSN:1471-3918
1878-1330
DOI:10.1016/S1471-3918(02)80071-5