Study on Input—output Model of Compliant Precise Micro—Location Spatial Stage

A precise micro-location compliant stage with elastics-supported system is enmployed for investigations.The general motion of stage supported by elastic structure is described.The analyses of forward displecement and inverse displacement of stage are formulated.The study of input-output behavior of...

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Published inJournal of Shanghai University Vol. 6; no. 1; pp. 85 - 91
Main Author 谢先海 廖道训
Format Journal Article
LanguageEnglish
Published 01.03.2002
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Abstract A precise micro-location compliant stage with elastics-supported system is enmployed for investigations.The general motion of stage supported by elastic structure is described.The analyses of forward displecement and inverse displacement of stage are formulated.The study of input-output behavior of compliant mechanisms actually belongs to a stress-strain field problem.By using finite element analysis.the compliance coefficients of the stage supported by ring are calculated.Finally,a case is inverstigated to exemplity these formulae.
AbstractList A precise micro-location compliant stage with elastics-supported system is employed for investigations. The general motion of stage supported by elastic structure is described. The analyses of forward displacement and inverse displacement of stage are formulated. The study of input-output behavior of compliant mechanisms actually belongs to a stress-strain field problem. By using finite element analysis, the compliance coefficients of the stage supported by ring are calculated. Finally, a case is investigated to exemplify these formulae.
A precise micro-location compliant stage with elastics-supported system is enmployed for investigations.The general motion of stage supported by elastic structure is described.The analyses of forward displecement and inverse displacement of stage are formulated.The study of input-output behavior of compliant mechanisms actually belongs to a stress-strain field problem.By using finite element analysis.the compliance coefficients of the stage supported by ring are calculated.Finally,a case is inverstigated to exemplity these formulae.
Author 谢先海 廖道训
AuthorAffiliation SchoolofMechanicalScienceandEngineering,HuazhongUniversityofScienceandTechnology,Wuhan430074,China SchoolofMechanicalScienceandEngineering,HuazhongUniversityofScienceandTechnology,Wuhan430074,China
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I Her (13_CR5) 1994; 116
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Snippet A precise micro-location compliant stage with elastics-supported system is enmployed for investigations.The general motion of stage supported by elastic...
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SubjectTerms 有限元分析
机械传动
输入输出模型
顺从机制
Title Study on Input—output Model of Compliant Precise Micro—Location Spatial Stage
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