Study on Input—output Model of Compliant Precise Micro—Location Spatial Stage

A precise micro-location compliant stage with elastics-supported system is enmployed for investigations.The general motion of stage supported by elastic structure is described.The analyses of forward displecement and inverse displacement of stage are formulated.The study of input-output behavior of...

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Bibliographic Details
Published inJournal of Shanghai University Vol. 6; no. 1; pp. 85 - 91
Main Author 谢先海 廖道训
Format Journal Article
LanguageEnglish
Published 01.03.2002
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Summary:A precise micro-location compliant stage with elastics-supported system is enmployed for investigations.The general motion of stage supported by elastic structure is described.The analyses of forward displecement and inverse displacement of stage are formulated.The study of input-output behavior of compliant mechanisms actually belongs to a stress-strain field problem.By using finite element analysis.the compliance coefficients of the stage supported by ring are calculated.Finally,a case is inverstigated to exemplity these formulae.
Bibliography:TH139
31-1735/N
ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:1007-6417
1863-236X
DOI:10.1007/s11741-002-0013-4