Study on Input—output Model of Compliant Precise Micro—Location Spatial Stage
A precise micro-location compliant stage with elastics-supported system is enmployed for investigations.The general motion of stage supported by elastic structure is described.The analyses of forward displecement and inverse displacement of stage are formulated.The study of input-output behavior of...
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Published in | Journal of Shanghai University Vol. 6; no. 1; pp. 85 - 91 |
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Main Author | |
Format | Journal Article |
Language | English |
Published |
01.03.2002
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Subjects | |
Online Access | Get full text |
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Summary: | A precise micro-location compliant stage with elastics-supported system is enmployed for investigations.The general motion of stage supported by elastic structure is described.The analyses of forward displecement and inverse displacement of stage are formulated.The study of input-output behavior of compliant mechanisms actually belongs to a stress-strain field problem.By using finite element analysis.the compliance coefficients of the stage supported by ring are calculated.Finally,a case is inverstigated to exemplity these formulae. |
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Bibliography: | TH139 31-1735/N ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 1007-6417 1863-236X |
DOI: | 10.1007/s11741-002-0013-4 |