AIN Thin Films Prepared by the Electron Shower Method
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Published in | Hyōmen gijutsu Vol. 47; no. 2; pp. 152 - 156 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
1996
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Online Access | Get full text |
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ISSN: | 0915-1869 1884-3409 |
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DOI: | 10.4139/sfj.47.152 |