Synergetic effect of potassium molybdate and benzotriazole on the CMP of ruthenium and copper in KIO 4 -based slurry
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Published in | Applied surface science Vol. 320; pp. 531 - 537 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
30.11.2014
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Online Access | Get full text |
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ISSN: | 0169-4332 |
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DOI: | 10.1016/j.apsusc.2014.09.062 |