Synergetic effect of potassium molybdate and benzotriazole on the CMP of ruthenium and copper in KIO 4 -based slurry

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Bibliographic Details
Published inApplied surface science Vol. 320; pp. 531 - 537
Main Authors Cheng, Jie, Wang, Tongqing, Mei, Hegeng, Zhou, Wenbin, Lu, Xinchun
Format Journal Article
LanguageEnglish
Published 30.11.2014
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ISSN:0169-4332
DOI:10.1016/j.apsusc.2014.09.062