Electron Beam Generated Plasmas for Ultra Low T e Processing
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Published in | ECS journal of solid state science and technology Vol. 4; no. 6; pp. N5033 - N5040 |
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Main Authors | , , , , , , |
Format | Journal Article |
Language | English |
Published |
2015
|
Online Access | Get full text |
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ISSN: | 2162-8769 2162-8777 |
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DOI: | 10.1149/2.0071506jss |