Dynamics of the surface composition and structure of InP oxidized in the presence of V and V2O5

Structure of the surface layers of V 2 O 5 (20, 38 nm)/InO and V(25, 15 nm)/InP heterostructures, including surface morphology, distributions of elements over the oxidized-layer thickness, phase composition, and the interface quality, are studied both before and after oxidation. According to the Aug...

Full description

Saved in:
Bibliographic Details
Published inInorganic materials Vol. 44; no. 11; pp. 1163 - 1168
Main Authors Lapenko, A. A., Lisitsyn, S. V., Tomina, E. V., Valyukhov, D. P., Mittova, I. Ya
Format Journal Article
LanguageEnglish
Published Dordrecht SP MAIK Nauka/Interperiodica 01.11.2008
Subjects
Augers
Catalysts
Chemistry
Chemistry and Materials Science
Heterostructures
Indium phosphates
Indium phosphides
Industrial Chemistry/Chemical Engineering
Inorganic Chemistry
Materials Science
Oxidation
Vanadates
Vanadium pentoxide
Effective Activation Energy
Vanadium Compound
Substrate Component
Vanadium Oxide
Vanadium
Online AccessGet full text

Cover

More Information
Summary:Structure of the surface layers of V 2 O 5 (20, 38 nm)/InO and V(25, 15 nm)/InP heterostructures, including surface morphology, distributions of elements over the oxidized-layer thickness, phase composition, and the interface quality, are studied both before and after oxidation. According to the Auger-and IR-spectroscopy data, the layers obtained as a result of the oxidation are mainly indium phosphates and vanadates with nonuniform distributions of elements over the oxide-film thickness. Results describing the kinetics of heterostructure oxidation are obtained. The solid-phase diffusion of the substrate components is shown to be the governing process. This implies that the considered process is catalytic. The reaction rate is weakly dependent on the catalyst amount.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0020-1685
1608-3172
DOI:10.1134/S0020168508110022