Design and Performance of Fiber Vibration Sensor Based on Fabry-Perot Structures with Microbubble

• Published in: IEEE sensors journal Vol. 23; no. 15; p. 1
• Main Authors: Wang, Yan-Nan, Li, Jin, Meng, Fanli
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.08.2023; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Acoustic sensor; Discharges (electric); Fabry-Perot; Fabry-Perot interferometer; Fabry-Perot interferometers; Frequency response; Luminous intensity; Optical fiber sensor; Optical fiber sensors; Optical fibers; Sensitivity; Sensors; Silicon films; Static pressure; Vibration monitoring; Vibration sensor; Vibrations
• ISSN: 1530-437X; 1558-1748
• DOI: 10.1109/JSEN.2023.3288084

Micro-bubble Fabry-Perot optical fiber vibration sensor has been proposed and used for monitoring the external vibration through its unique ultra-thin silicon film. The vibration signal deforms the silicon film and changes the intensity of reflected light, so as to establish their depending relationship. In this paper, the fabrication method of micro-bubble Fabry-Perot optical fiber vibration sensing probe, as well as the flexible adjustment method of Fabry-Perot cavity length are analyzed and discussed. By comparing the frequency response of micro-bubble cavity structures with different parameters, the influence law of the cavity morphology on the vibration sensing performance has been studied. The designed vibration sensor based on the micro-bubble Fabry-Perot interference cavity has the small size, compact structure and high sensitivity, which is suitable for real-time monitoring of static pressure and dynamic vibration in complex environment, such as narrow space. This work can provide some theoretical and technical reference for developing the miniature vibration sensor devices with high-performance.