VIA-1 focused-ion-beam processes for device fabrication

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Bibliographic Details
Published inIEEE transactions on electron devices Vol. 28; no. 10; p. 1253
Main Authors Kubena, R.L., Anderson, C.L., Seliger, R.L., Brault, R.G., Miller, L.J.
Format Journal Article
LanguageEnglish
Published IEEE 01.10.1981
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Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0018-9383
1557-9646
DOI:10.1109/T-ED.1981.20582