AFM-in-SEM as a Tool for Comprehensive Sample Surface Analysis

Abstract Key features and applications of a unique atomic force microscope (AFM), the LiteScope™, which can be integrated into a scanning electron microscope (SEM) is reported. Using the AFM-in-SEM as one tool combines the capabilities of both systems in a very efficient way. The LiteScope design fe...

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Bibliographic Details
Published inMicroscopy today Vol. 28; no. 3; pp. 38 - 46
Main Authors Novotna, Veronika, Horak, Josef, Konecny, Martin, Hegrova, Veronika, Novotny, Ondrej, Novacek, Zdenek, Neuman, Jan
Format Magazine Article
LanguageEnglish
Published Oxford Oxford University Press 01.05.2020
Subjects
Atomic force microscopes
Atomic force microscopy
Ion beams
Mechanical properties
Microscopes
Nanoindentation
Scanners
Scanning electron microscopy
Spectrum analysis
Surface analysis (chemical)
Topography
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Summary:Abstract Key features and applications of a unique atomic force microscope (AFM), the LiteScope™, which can be integrated into a scanning electron microscope (SEM) is reported. Using the AFM-in-SEM as one tool combines the capabilities of both systems in a very efficient way. The LiteScope design features advanced Correlative Probe and Electron Microscopy (CPEM)™ imaging technology that allows simultaneous acquisition of multiple AFM and SEM signals and their precise in-time correlation into a 3D CPEM view. AFM-in-SEM advantages are presented using several examples of applications and AFM measurement modes including CPEM, material electrical and mechanical properties together with nanoindentation, and focused ion beam (FIB) applications.
ISSN:1551-9295
2150-3583
DOI:10.1017/S1551929520000875