Effect of annealing temperature on the microstructure and photoluminescence of low resistivity Si/SiN/TaN thin films using magnetron sputtering

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Published inThin solid films Vol. 520; no. 5; pp. 1460 - 1463
Main Authors Chung, C.K., Chen, T.S., Chang, N.W., Liao, M.W., Lee, C.T.
Format Journal Article
LanguageEnglish
Published 30.12.2011
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Author Lee, C.T.
Chung, C.K.
Chang, N.W.
Liao, M.W.
Chen, T.S.
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Title Effect of annealing temperature on the microstructure and photoluminescence of low resistivity Si/SiN/TaN thin films using magnetron sputtering
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