Effect of annealing temperature on the microstructure and photoluminescence of low resistivity Si/SiN/TaN thin films using magnetron sputtering
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Published in | Thin solid films Vol. 520; no. 5; pp. 1460 - 1463 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
30.12.2011
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Online Access | Get full text |
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ISSN: | 0040-6090 |
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DOI: | 10.1016/j.tsf.2011.07.061 |