Mass spectrometric investigations on plasmas obtained from a dual electron cyclotron resonance-radio frequency discharge

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Bibliographic Details
Published inPlasma sources science & technology Vol. 7; no. 4; pp. 607 - 616
Main Authors Zarrabian, M, Leteinturier, C, Turban, G
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.11.1998
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ISSN:0963-0252
1361-6595
DOI:10.1088/0963-0252/7/4/018