Mass spectrometric investigations on plasmas obtained from a dual electron cyclotron resonance-radio frequency discharge
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Published in | Plasma sources science & technology Vol. 7; no. 4; pp. 607 - 616 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
IOP Publishing
01.11.1998
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Online Access | Get full text |
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ISSN: | 0963-0252 1361-6595 |
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DOI: | 10.1088/0963-0252/7/4/018 |