Laser-induced fluorescence measurements of absolute SiH densities in - RF discharges and comparison with a numerical model

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Published inPlasma sources science & technology Vol. 7; no. 2; pp. 130 - 135
Main Authors Hertl, Michael, Dorval, Nelly, Leroy, Olivier, Jolly, Jacques, Péalat, Michel
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.05.1998
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Author Leroy, Olivier
Péalat, Michel
Hertl, Michael
Jolly, Jacques
Dorval, Nelly
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Title Laser-induced fluorescence measurements of absolute SiH densities in - RF discharges and comparison with a numerical model
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