Laser-induced fluorescence measurements of absolute SiH densities in - RF discharges and comparison with a numerical model

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Bibliographic Details
Published inPlasma sources science & technology Vol. 7; no. 2; pp. 130 - 135
Main Authors Hertl, Michael, Dorval, Nelly, Leroy, Olivier, Jolly, Jacques, Péalat, Michel
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.05.1998
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ISSN:0963-0252
1361-6595
DOI:10.1088/0963-0252/7/2/006