Correction: Achievement of Green and Sustainable CVD Through Process, Equipment and Systematic Optimization in Semiconductor Fabrication

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Bibliographic Details
Published inInternational journal of precision engineering and manufacturing-green technology Vol. 11; no. 4; p. 1435
Main Authors Baek, Song Yi, Park, Jingyu, Koh, Taeyoung, Kim, Dohyung, Woo, Jewoung, Jung, Jinwoo, Park, Se Jun, Lee, Changsoo, Choi, Chulhwan
Format Journal Article
LanguageEnglish
Published Seoul Korean Society for Precision Engineering 01.10.2024
Springer Nature B.V
Subjects
Correction
Energy Efficiency
Engineering
Fabrication
Industrial and Production Engineering
Sustainable Development
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Bibliography:correction
ISSN:2288-6206
2198-0810
DOI:10.1007/s40684-024-00631-x