A Novel Reactor Design Configuration for Contamination Control and Improved Performance in the Polysilicon Doping Process Using POCl3

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Bibliographic Details
Published inJournal of the Electrochemical Society Vol. 141; no. 8; pp. 2257 - 2262
Main Authors Roy, Sudipto R., Glynn, Phil, Hogan, Rod, Reynolds, Jeff
Format Journal Article
LanguageEnglish
Published 01.08.1994
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.2055099