A Novel Reactor Design Configuration for Contamination Control and Improved Performance in the Polysilicon Doping Process Using POCl3
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Published in | Journal of the Electrochemical Society Vol. 141; no. 8; pp. 2257 - 2262 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
Published |
01.08.1994
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Online Access | Get full text |
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ISSN: | 0013-4651 1945-7111 |
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DOI: | 10.1149/1.2055099 |