Multi-witness glass monitoring strategy for two-cavity thin-film Fabry-Perot filters
Narrow bandpass thin-film filters are frequently used for many applications that require frequency filtering. Although various designs and approaches have been studied in past decades, they still present serious challenges regarding deposition. Especially, as the required passband of the designs bec...
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Published in | Optics continuum Vol. 3; no. 9; p. 1622 |
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Main Authors | , , , , , |
Format | Journal Article |
Language | English |
Published |
Optica Publishing Group
15.09.2024
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Subjects | |
Online Access | Get full text |
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Summary: | Narrow bandpass thin-film filters are frequently used for many applications that require frequency filtering. Although various designs and approaches have been studied in past decades, they still present serious challenges regarding deposition. Especially, as the required passband of the designs becomes narrower, the accuracy needed on layer thicknesses increases involving more difficulty to control the layers during deposition. This paper presents a multi-witness glass monitoring strategy for narrow thin film Fabry-Perot filter deposition. |
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ISSN: | 2770-0208 2770-0208 |
DOI: | 10.1364/OPTCON.533681 |