Thin Films: Exploiting In Situ Redox and Diffusion of Molybdenum to Enable Thin‐Film Circuitry for Low‐Cost Wireless Energy Harvesting (Adv. Funct. Mater. 5/2019)
In article number 1806002, Rebecca L. Peterson and Youngbae Son report a simple process for simultaneous fabrication of thin film diodes and transistors using selective‐area reactions. In some regions, thermodynamically‐driven redox and diffusion of a molybdenum film during oxide semiconductor depos...
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Published in | Advanced functional materials Vol. 29; no. 5 |
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Main Authors | , |
Format | Journal Article |
Language | English |
Published |
Hoboken
Wiley Subscription Services, Inc
01.02.2019
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Subjects | |
Online Access | Get full text |
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Summary: | In article number 1806002, Rebecca L. Peterson and Youngbae Son report a simple process for simultaneous fabrication of thin film diodes and transistors using selective‐area reactions. In some regions, thermodynamically‐driven redox and diffusion of a molybdenum film during oxide semiconductor deposition forms a rectifying contact, whereas in areas without exposed metal, oxide transistors are made. RF wireless energy harvesting circuits are demonstrated. This work opens the door for future low‐cost, multi‐functional thin film electronics. |
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ISSN: | 1616-301X 1616-3028 |
DOI: | 10.1002/adfm.201970029 |