Thin Films: Exploiting In Situ Redox and Diffusion of Molybdenum to Enable Thin‐Film Circuitry for Low‐Cost Wireless Energy Harvesting (Adv. Funct. Mater. 5/2019)

In article number 1806002, Rebecca L. Peterson and Youngbae Son report a simple process for simultaneous fabrication of thin film diodes and transistors using selective‐area reactions. In some regions, thermodynamically‐driven redox and diffusion of a molybdenum film during oxide semiconductor depos...

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Bibliographic Details
Published inAdvanced functional materials Vol. 29; no. 5
Main Authors Son, Youngbae, Peterson, Rebecca L.
Format Journal Article
LanguageEnglish
Published Hoboken Wiley Subscription Services, Inc 01.02.2019
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Summary:In article number 1806002, Rebecca L. Peterson and Youngbae Son report a simple process for simultaneous fabrication of thin film diodes and transistors using selective‐area reactions. In some regions, thermodynamically‐driven redox and diffusion of a molybdenum film during oxide semiconductor deposition forms a rectifying contact, whereas in areas without exposed metal, oxide transistors are made. RF wireless energy harvesting circuits are demonstrated. This work opens the door for future low‐cost, multi‐functional thin film electronics.
ISSN:1616-301X
1616-3028
DOI:10.1002/adfm.201970029