Characterization of III/V Semiconductors on Silicon by Analyzing 4D-STEM Data with Convolutional Neural Networks

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Bibliographic Details
Published inMicroscopy and microanalysis Vol. 27; no. S1; pp. 450 - 452
Main Authors Heimes, Damien, Scheunert, Jonas, Beyer, Andreas, Belz, Jürgen, Firoozabadi, Saleh, Volz, Kerstin
Format Journal Article
LanguageEnglish
Published New York, USA Cambridge University Press 01.08.2021
Oxford University Press
Subjects
Analytical Sciences Symposia
Artificial neural networks
Datasets
Electric fields
Full System and Workflow Automation for Enabling Big Data and Machine Learning in Electron Microscopy
Group III-V semiconductors
Materials science
Neural networks
Semiconductors
Sensors
Transmission electron microscopy
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ISSN:1431-9276
1435-8115
DOI:10.1017/S1431927621002117