Application of Atom Probe Tomography to Atomic Layer Deposited Thin Films

Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

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Bibliographic Details
Published inMicroscopy and microanalysis Vol. 19; no. S2; pp. 1028 - 1029
Main Authors Giddings, A.D., Prosa, T.J., Kelly, T.F., Larson, D.J.
Format Journal Article
LanguageEnglish
Published New York, USA Cambridge University Press 01.08.2013
Oxford University Press
Subjects
A12.P2 Atom Probe Tomography In Correlative Investigations
Instrumentation Sciences
Microscopy
Thin films
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Summary:Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.
ISSN:1431-9276
1435-8115
DOI:10.1017/S1431927613007137