Strain Engineering in Aluminum Scandium Nitride Thin Film using Four-dimensional Scanning Transmission Electron Microscopy (4D-STEM) Technique

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Bibliographic Details
Published inMicroscopy and microanalysis Vol. 27; no. S1; pp. 2204 - 2205
Main Authors Musavigharavi, Pariasadat, Meng, Andrew, Wang, Dixiong, Zheng, Jeffery, Foucher, Alexandre, Olsson, Roy H., Stach, Eric
Format Journal Article
LanguageEnglish
Published New York, USA Cambridge University Press 01.08.2021
Oxford University Press
Subjects
Aluminum
Analytical Sciences Symposia
Diffraction Imaging Across Disciplines
Scandium
Scanning transmission electron microscopy
Thin films
Transmission electron microscopy
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ISSN:1431-9276
1435-8115
DOI:10.1017/S1431927621007935