S9000X - Next Generation of Ultra-High Resolution SEM for Enhanced Analysis and Xe Plasma FIB for Ultra-Fast and Gentle Sputtering
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Published in | Microscopy and microanalysis Vol. 24; no. S1; pp. 1116 - 1117 |
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Main Authors | , , , , , |
Format | Journal Article |
Language | English |
Published |
New York, USA
Cambridge University Press
01.08.2018
Oxford University Press |
Subjects | |
Online Access | Get full text |
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ISSN: | 1431-9276 1435-8115 |
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DOI: | 10.1017/S1431927618006062 |