Surface etching effects of amorphous C:H and CN :H films formed by supermagnetron plasma for field emission use

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Bibliographic Details
Published inThin solid films Vol. 516; no. 11; pp. 3656 - 3660
Main Authors Kinoshita, Haruhisa, Yamashita, Manabu, Yamaguchi, Tomuo
Format Journal Article
LanguageEnglish
Published 01.04.2008
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ISSN:0040-6090
DOI:10.1016/j.tsf.2007.08.041