ChemInform Abstract: Energy-Enhanced Atomic Layer Deposition for More Process and Precursor Versatility

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Bibliographic Details
Published inChemInform Vol. 45; no. 16; p. no
Main Authors Potts, S. E., Kessels, W. M. M.
Format Journal Article
LanguageEnglish
Published Weinheim WILEY-VCH Verlag 22.04.2014
WILEY‐VCH Verlag
Wiley Subscription Services, Inc
Subjects
applied chemistry
applied chemistry, review
lasers
review
semiconductors
structure (solids and liquids)
superconductors
technology of materials
technology of materials, lasers, semiconductors, superconductors
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Summary:Review: 201 refs.
Bibliography:istex:E72FCBFD0F05E7D6939972DFFA63A99E5C70C119
ArticleID:CHIN201416288
ark:/67375/WNG-S9F1HK26-J
ISSN:0931-7597
1522-2667
DOI:10.1002/chin.201416288