Influence of anisotropy of single-crystalline silicon on dynamic characteristics of microelectromechanical resonators

It is represented a comparative analysis of topological solutions at the stage of microelectromechanical resonators design. It is researched dependence of sensitivity of oscillating system on its orientation regarding basic crystallographic axis. We developed the requirements of selection of planar...

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Bibliographic Details
Published inRadioelectronics and communications systems Vol. 57; no. 11; pp. 516 - 520
Main Authors Kirshina, I. A., Okin, P. A., Filonov, O. M.
Format Journal Article
LanguageEnglish
Published Heidelberg Allerton Press 05.12.2014
Subjects
Communications Engineering
Engineering
Networks
Measuring Converter
Poisson Coefficient
Angular Orientation
Resonator Length
Resonance Sensor
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Summary:It is represented a comparative analysis of topological solutions at the stage of microelectromechanical resonators design. It is researched dependence of sensitivity of oscillating system on its orientation regarding basic crystallographic axis. We developed the requirements of selection of planar construction topology dependently on the devices purpose.
ISSN:0735-2727
1934-8061
DOI:10.3103/S0735272714110065