Influence of anisotropy of single-crystalline silicon on dynamic characteristics of microelectromechanical resonators
It is represented a comparative analysis of topological solutions at the stage of microelectromechanical resonators design. It is researched dependence of sensitivity of oscillating system on its orientation regarding basic crystallographic axis. We developed the requirements of selection of planar...
Saved in:
Published in | Radioelectronics and communications systems Vol. 57; no. 11; pp. 516 - 520 |
---|---|
Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
Heidelberg
Allerton Press
05.12.2014
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | It is represented a comparative analysis of topological solutions at the stage of microelectromechanical resonators design. It is researched dependence of sensitivity of oscillating system on its orientation regarding basic crystallographic axis. We developed the requirements of selection of planar construction topology dependently on the devices purpose. |
---|---|
ISSN: | 0735-2727 1934-8061 |
DOI: | 10.3103/S0735272714110065 |