On Optimal Control of an Epitaxial Reactor

The aim of this paper is to determine an optimal control law for the thermal regulation in an epitaxial reactor, minimizing a quadratic performance index. The KAWASAKI - SHIMEMURA method has been applied to select the best weighting matrices of the criterion in order to obtain suitable dynamics of t...

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Bibliographic Details
Published inIFAC Proceedings Volumes Vol. 20; no. 1; pp. 181 - 184
Main Authors Babary, J.P., Hariri, A.
Format Journal Article
LanguageEnglish
Published 01.06.1987
Subjects
closed loop systems
distributed parameter systems
epitaxial reactor
heat systems
Optimal control
process control
closed loop systems
epitaxial reactor
distributed parameter systems
process control
Optimal control
heat systems
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Summary:The aim of this paper is to determine an optimal control law for the thermal regulation in an epitaxial reactor, minimizing a quadratic performance index. The KAWASAKI - SHIMEMURA method has been applied to select the best weighting matrices of the criterion in order to obtain suitable dynamics of the system.
ISSN:1474-6670
DOI:10.1016/S1474-6670(17)59296-4