Spatio-temporal measurements Ar 2p1 excitation rates and optical emission spectroscopy by capacitively coupled Ar and Ne mixed gas plasma

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Bibliographic Details
Published inMRS advances Vol. 7; no. 31; pp. 918 - 922
Main Authors Otaka, Michihiro, Arima, Toshiaki, Lai, Jiansyun, Ikeda, Kizuki, Kamataki, Kunihiro, Yamashita, Naoto, Okumura, Takamasa, Itagaki, Naho, Koga, Kazunori, Shiratani, Masaharu
Format Journal Article
LanguageEnglish
Japanese
Published 11.07.2022
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ISSN:2059-8521
2059-8521
DOI:10.1557/s43580-022-00306-2