An Active Visible-Light Integrated Photonics Platform on 200-mm Si

We present a foundry-fabricated monolithically integrated photonics platform for the visible spectrum (λ=445-640nm) with two layers of silicon nitride waveguides, silicon photodiodes, efficient undercut thermo-optic phase shifters, in situ trimming, and electro-thermal MEMS devices.

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Bibliographic Details
Published in2023 Optical Fiber Communications Conference and Exhibition (OFC) pp. 1 - 3
Main Authors Sacher, Wesley D., Lin, Yiding, Chen, Hong, Azadeh, Saeed S., Yong, Zheng, Luo, Xianshu, Chua, Hongyao, Mak, Jason C. C., Govdeli, Alperen, Sharma, Ankita, Mikkelsen, Jared C., Mu, Xin, Stalmashonak, Andrei, Lo, Guo-Qiang, Poon, Joyce K. S.
Format Conference Proceeding
LanguageEnglish
Published OSA 01.03.2023
Subjects
Micromechanical devices
Optical fiber communication
Optical waveguides
Phase shifters
Photodiodes
Silicon
Silicon nitride
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Summary:We present a foundry-fabricated monolithically integrated photonics platform for the visible spectrum (λ=445-640nm) with two layers of silicon nitride waveguides, silicon photodiodes, efficient undercut thermo-optic phase shifters, in situ trimming, and electro-thermal MEMS devices.
DOI:10.1364/OFC.2023.Tu3C.5