Preparation of dielectric layers for applications in digital microfluidic thermal switches
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Published in | Informacije MIDEM (Spletna izd.) Vol. 51; no. 3; pp. 5 - 0 |
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Main Authors | , , , , , , , |
Format | Journal Article |
Language | English |
Published |
MIDEM Society - Society for Microelectronics, Electronic Components and Materials
26.07.2024
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Online Access | Get full text |
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ISSN: | 0352-9045 2232-6979 |
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DOI: | 10.33180/InfMIDEM2024.305 |