A Low-Voltage and High Uniformity Nano-Electro-Mechanical System Tunable Color Filter Based on Subwavelength Grating

Saved in:
Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 51; no. 11S; p. 11
Main Authors Honma, Hiroaki, Takahashi, Kazuhiro, Ishida, Makoto, Sawada, Kazuaki
Format Journal Article
LanguageEnglish
Published 01.11.2012
Online AccessGet full text

Cover

More Information
ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.51.11PA01