Fabrication of GaAs-on-Insulator via Low Temperature Wafer Bonding and Sacrificial Etching of Ge by XeF 2

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Bibliographic Details
Published inJournal of the Electrochemical Society Vol. 159; no. 2; pp. H183 - H190
Main Authors Bai, Yu, Cole, Garrett D., Bulsara, Mayank T., Fitzgerald, Eugene A.
Format Journal Article
LanguageEnglish
Published 2012
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ISSN:0013-4651
1945-7111
DOI:10.1149/2.070202jes