Ce-doped TiO 2 Insulators in Thin Film Electroluminescent Devices
Cerium-doped TiO 2 thin films have been prepared by reactive RF sputtering. At low Ce concentration, X-ray diffraction indicates that the films have the anatase structure. Ce concentrations higher than 1.2 at.% result in an amorphization of the film which remains stable up to 873 K. The TiO 2 electr...
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Published in | Japanese Journal of Applied Physics Vol. 36; no. 9R; p. 5696 |
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Main Authors | , , , , , , |
Format | Journal Article |
Language | English |
Published |
01.09.1997
|
Online Access | Get full text |
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Summary: | Cerium-doped TiO
2
thin films have been prepared by reactive RF sputtering. At low Ce concentration, X-ray diffraction indicates that the films have the anatase structure. Ce concentrations higher than 1.2 at.% result in an amorphization of the film which remains stable up to 873 K. The TiO
2
electrical properties have been stabilized and improved by cerium doping, resulting in a lower conductivity (10
-9
Ω
-1
m
-1
), a higher electrical breakdown strength (2 ×10
7
V/m), and a high value of the permittivity (45±5). The implementation of amorphous TiO
2
:Ce thin films as insulator layers in ZnS:Mn alternating current thin film electroluminescent devices (ACTFELD) results in a significant drop in the threshold operating voltage and a notable increase in the device brightness compared with ACTFELD containing Y
2
O
3
or BaTa
2
O
6
insulator layers. Rapid thermal annealing further improves the performance of the electroluminescent device. |
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ISSN: | 0021-4922 1347-4065 |
DOI: | 10.1143/JJAP.36.5696 |