Formation of Porous Noble Metal Layer by Displacement Reactions with Porous Silicon

Porous Pd layer was synthesized on a Si wafer using anodized porous Si as a starting material. In the immersion plating, Pd replaced Si and porous Pd layer was formed. Pt was deposited on the porous Pd layer by galvanic displacement reaction. It was demonstrated that fabrication process of our micro...

Full description

Saved in:
Bibliographic Details
Published inECS transactions Vol. 16; no. 3; pp. 231 - 235
Main Authors Hayase, Masanori, Matsuzaka, Taku, Brito-Neto, Jose Geraldo Alves
Format Journal Article
LanguageEnglish
Published 2009
Online AccessGet full text

Cover

More Information
Summary:Porous Pd layer was synthesized on a Si wafer using anodized porous Si as a starting material. In the immersion plating, Pd replaced Si and porous Pd layer was formed. Pt was deposited on the porous Pd layer by galvanic displacement reaction. It was demonstrated that fabrication process of our micro fuel cell electrode was applicable.
ISSN:1938-5862
1938-6737
DOI:10.1149/1.2982560