In-line Automatic Defect Inspection and Repair Method for a High Yield TFT Array Production

We have developed an automated circuit defect inspection and repair method that can be used to improve the yield ratio of Thin Film Transistor substrates for liquid crystal displays. The method focuses on correcting resist patterns after the development process to ensure shape regularity. We built a...

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Bibliographic Details
Published inECS transactions Vol. 8; no. 1; pp. 267 - 272
Main Authors Honoki, Hideyuki, Nakasu, Nobuaki, Arai, Takeshi, Yoshimura, Kazushi, Edamura, Tadao
Format Journal Article
LanguageEnglish
Published 20.07.2007
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