In-line Automatic Defect Inspection and Repair Method for a High Yield TFT Array Production

We have developed an automated circuit defect inspection and repair method that can be used to improve the yield ratio of Thin Film Transistor substrates for liquid crystal displays. The method focuses on correcting resist patterns after the development process to ensure shape regularity. We built a...

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Bibliographic Details
Published inECS transactions Vol. 8; no. 1; pp. 267 - 272
Main Authors Honoki, Hideyuki, Nakasu, Nobuaki, Arai, Takeshi, Yoshimura, Kazushi, Edamura, Tadao
Format Journal Article
LanguageEnglish
Published 20.07.2007
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Summary:We have developed an automated circuit defect inspection and repair method that can be used to improve the yield ratio of Thin Film Transistor substrates for liquid crystal displays. The method focuses on correcting resist patterns after the development process to ensure shape regularity. We built a prototype system and confirmed that the method is valid. This method can be used to produce a high yield of TFT-LCD at a low cost and eliminate defects.
ISSN:1938-5862
1938-6737
DOI:10.1149/1.2767319