Phase Transition and Microstructural Changes of Sol–Gel Derived ZrO 2 /Si Films by Thermal Annealing: Possible Stability of Tetragonal Phase without Transition to Monoclinic Phase

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Bibliographic Details
Published inJournal of physical chemistry. C Vol. 116; no. 20; pp. 11386 - 11392
Main Authors Hwang, Soo Min, Choi, Jun Hyuk, Lee, Seung Muk, Lim, Jun Hyung, Joo, Jinho
Format Journal Article
LanguageEnglish
Published 24.05.2012
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ISSN:1932-7447
1932-7455
DOI:10.1021/jp3022985