Full CMP Integration of TiN Damascene Metal Gate Devices
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Published in | 30th European Solid-State Device Research Conference pp. 408 - 411 |
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Main Authors | , , , , , , , , , , , |
Format | Conference Proceeding |
Language | English |
Published |
Editions Frontieres
2000
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Subjects | |
Online Access | Get full text |
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ISBN: | 9782863322482 2863322486 |
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DOI: | 10.1109/ESSDERC.2000.194801 |