Pressure sensor based on surface acoustic wave resonators

In this work we present a pressure sensor based on surface acoustic waves (SAWs) resonators and operating in the pressure range from 0 bar to 3 bar. The achieved high resolution values (3.5 Pa), are obtained making use of 2-ports SAW resonators working at approximately 393 MHz on a quartz membrane....

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Bibliographic Details
Published in2008 IEEE Sensors pp. 1024 - 1027
Main Authors Benetti, M., Cannata, D., Di Pietrantonio, F., Marchiori, C., Persichetti, P., Verona, E.
Format Conference Proceeding
LanguageEnglish
Published IEEE 01.10.2008
Subjects
Acoustic sensors
Acoustic waves
Anisotropic magnetoresistance
Biomembranes
Ceramics
Finite element methods
Glass
Sawing machines
Sensor phenomena and characterization
Surface acoustic waves
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Summary:In this work we present a pressure sensor based on surface acoustic waves (SAWs) resonators and operating in the pressure range from 0 bar to 3 bar. The achieved high resolution values (3.5 Pa), are obtained making use of 2-ports SAW resonators working at approximately 393 MHz on a quartz membrane. The membrane deformations under the hydrostatic pressure, have been studied by finite element methods (FEM), using the elastic constants of the anisotropic ST-cut quartz and considering vacuum as reference pressure on the other side of the membrane. The implemented sensor is an hybrid structure where the quartz membrane is placed between two glass ceramic elements; the first to implement an hermetically closed cavity, the other to define the diaphragm. A differential configuration has been designed to reduce parasitic phenomena due to temperature variations. The response curve of the sensor is reported.
ISBN:1424425808
9781424425808
ISSN:1930-0395
2168-9229
DOI:10.1109/ICSENS.2008.4716617