Effect of SiO[sub 2] Thickness on Dielectric Breakdown Defect Density Due to Surface Crystal-Originated Particles

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Bibliographic Details
Published inJournal of the Electrochemical Society Vol. 150; no. 3; p. F42
Main Authors Yamabe, Kikuo, Shimada, Yasuhiro, Piao, Min, Yamazaki, Tohru, Otsuki, Tsuyoshi, Takeda, Ryuji, Ohta, Yasumitsu, Jimbo, Susumu, Watanabe, Masaharu
Format Journal Article
LanguageEnglish
Japanese
Published 2003
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ISSN:0013-4651
DOI:10.1149/1.1541008