Comparison of  CF 3Cl and  C 2 F 6 + Cl2 Plasma Chemistry by Power Modulation

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Bibliographic Details
Published inJournal of the Electrochemical Society Vol. 139; no. 5; pp. 1414 - 1420
Main Authors Kiss, L. D. B., Sawin, H. H.
Format Journal Article
LanguageEnglish
Japanese
Published 01.05.1992
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ISSN:0013-4651
1945-7111
DOI:10.1149/1.2069422