Surface Profile Measurement of Micro-Optics by Using a Long Stroke Atomic Force Microscope

• Published in: Applied mechanics and materials Vol. 870; pp. 102 - 107
• Main Authors: Gao, Wei, Ito, So, Li, Ming Lei, Jia, Zhi Gang, Shimizu, Yuki, Chen, Yuan Liu
• Format: Journal Article
• Language: English
• Published: Zurich Trans Tech Publications Ltd 01.09.2017
• Subjects: Amplitudes; Atomic force microscopes; Atomic force microscopy; Micro-optics; Microscopes; Optical components; Profile measurement; Tungsten; Tapping Mode; Probe; Microstructure; Large Amplitude; LS-AFM
• ISBN: 9783035712346; 3035712344
• ISSN: 1660-9336; 1662-7482; 1662-7482
• DOI: 10.4028/www.scientific.net/AMM.870.102

In this study, a long stroke atomic force microscope (LS-AFM) has been developed for the measurement of the micro-optics which have micrometric amplitude surface structures. An electrochemically polished tungsten wire is used as the AFM probe tip. Since the effective length of the tungsten probe is more than 100 μm, the probe tip can access valley part without the interference between the steep slope and the sidewall of the probe tip. By using the long stroke PZT Z scanner whose long stroke of 70 μm and a resolution of 1 nm, micrometric amplitude of the optical elements can be measured. A linear encoder is employed to measure the displacement of Z scanner in Z direction. A well-detected result of a prism sheet film profile has been obtained by the LS-AFM and its tapping mode.