Selective Etching of Al x Ga1 − x As and In ( Al x Ga1 − x ) As Alloys in Succinic Acid‐ Hydrogen Peroxide Solutions

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Bibliographic Details
Published in	Journal of the Electrochemical Society Vol. 140; no. 5; pp. L82 - L83
Main Authors	Tang, A. J., Sadra, K., Streetman, B. G.
Format	Journal Article
Language	English
Published	01.05.1993
Online Access	Get full text

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ISSN:	0013-4651 1945-7111
DOI:	10.1149/1.2221592