TEM and FESEM investigation of Lanthanum nickelate thin films obtained by chemical solution deposition
Lanthanum nickelate (LNO) is a perovskite oxide material with metallic conductivity in a wide temperature range which makes it suitable for application as electrode material for thin films. In this paper LNO thin films were prepared by polymerizable complex method from the diluted citrate solutions....
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Published in | Processing and Application of Ceramics Vol. 6; no. 2; pp. 103 - 107 |
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Main Authors | , , , , , |
Format | Journal Article |
Language | English |
Published |
University of Novi Sad
01.06.2012
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Subjects | |
Online Access | Get full text |
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Summary: | Lanthanum nickelate (LNO) is a perovskite oxide material with metallic
conductivity in a wide temperature range which makes it suitable for
application as electrode material for thin films. In this paper LNO thin
films were prepared by polymerizable complex method from the diluted citrate
solutions. Precursor solutions were spin coated onto Si-substrates with
amorphous layer of SiO2. Deposited layers were thermally treated from the
substrate side with low heating rate (1?/min) up to 700?C and finally
annealed for 10 hours. Results of AFM and FESEM showed that films are very
smooth (Ra = 4 nm), dense, crack-free and with large square-shaped grains
(170 nm). According to FESEM and TEM results the obtained four-layered film
was only 65 nm thin. EBSD and XRD analyses confirmed polycrystalline
microstructure of the films without preferential orientation. It was
concluded that the presence of SiO2 layer on Si substrate prevents epitaxial
or oriented growth of LNO. |
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ISSN: | 1820-6131 2406-1034 |
DOI: | 10.2298/PAC1202103P |