Plasma-Enabled ALD of Niobium Nitride with Organometallic Nb Precursors

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Bibliographic Details
Published inMeeting abstracts (Electrochemical Society) Vol. MA2010-02; no. 20; p. 1418
Main Authors Deguns, Eric, Sowa, Mark, Dalberth, Mark, Bhatia, Ritwik, Kanjolia, Ravi, Moser, Dan, Sundaram, Ganesh, Becker, Jill
Format Journal Article
LanguageEnglish
Published 08.07.2010
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ISSN:2151-2043
2151-2035
DOI:10.1149/MA2010-02/20/1418