Multichannel Microchemical Reactor Comprising Replica-Molded Microplasma Devices: Chemiluminescence and Sulfur Deposition in \hbox Flows

• Published in: IEEE transactions on plasma science Vol. 36; no. 4; pp. 1250 - 1251
• Main Authors: Anderson, T.S., Ma, J.H., Sung-Jin Park, Eden, J.G.
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.08.2008; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Argon; Chemical reactors; Chemiluminescence; Fluid flow; Inductors; Microcavities; microchannels; microchemical reactor; microplasmas; Microstructure; Plasma; Plasma devices; Plasma materials processing; Plasma temperature; Plastics; Polymers; Sulfur; Voltage
• ISSN: 0093-3813; 1939-9375
• DOI: 10.1109/TPS.2008.926955

Microchemical reactors consisting of parallel linear arrays of interconnected cylindrical microcavity plasma devices have been fabricated by replica molding in ultraviolet-curable polymer. Tests of 10 times 10 arrays of 400-mum-diameter devices with 125-mum-wide gas flow channels have been conducted in rare gas and Ar/CS 2 flows and excitation of the array with a sinusoidal voltage. Visible chemiluminescence (lambda ~ 505 nm) resulting from the A tilde rarr X tilde transition of CS 2 + and the deposition of a (C-S) n microstructured polymer have been observed in the Ar/CS2 flow experiments.