Patterning with Amorphous Carbon Thin Films

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Bibliographic Details
Published inMeeting abstracts (Electrochemical Society) Vol. MA2011-01; no. 22; p. 1406
Main Authors Antonelli, George A., Reddy, Sirish, Subramonium, Pramod, Henri, Jon, Sims, Jim, O'loughlin, Jennifer, Shamma, Nader, Schloser, Don, Mountsier, Tom, Guo, Wei, Sawin, Herb
Format Journal Article
LanguageEnglish
Published 01.03.2011
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ISSN:2151-2043
2151-2035
DOI:10.1149/MA2011-01/22/1406